Cleanroom AHU
Cleanroom HVAC system optimized for ultra-clean environments in semiconductor, display, pharmaceutical (GMP), and precision equipment industries. Achieves Class 1–100,000 cleanliness with HEPA/ULPA filtration, precision temperature/humidity control, and positive pressure management.
NBPKOREA Cleanroom AHU is designed to manage cleanliness, temperature, humidity, and differential pressure within the process room as a single system. It delivers a stable production environment for facilities where fine particle and outdoor air ingress control are critical, such as semiconductor FABs, display lines, and pharmaceutical GMP facilities.
Applications
Cleanroom Control Flow
Filtration, heat source control, differential pressure management, and ventilation rate control are integrated and designed to meet process requirements.
Product Features
Key Capabilities
Cleanliness Response
Class 1~100,000
Filter grade, airflow, and room pressure conditions are combined to meet the required cleanliness level.
Pressure Control
Positive Pressure
Differential pressure between clean zones and general areas is maintained to prevent external contamination ingress.
Filtration
HEPA / ULPA
From pre-filter to final filter stage, configured according to process characteristics.
Operation Control
Temp · RH · DP
Temperature, humidity, and differential pressure are managed together to reduce production quality variation.
Core Modules
Filter Stages
Pre-filter, medium filter, and HEPA/ULPA final filter are combined to meet process-specific cleanliness requirements.
Air Circulation
FFU, recirculation air, and outdoor air intake are reviewed together to ensure stable airflow and indoor uniformity.
Differential Pressure Management
Pressure differences between clean and general zones are designed in stages to minimize contamination ingress.
Automatic Control
Temperature, humidity, differential pressure, and airflow are centrally controlled and integrated with BMS.
Design Considerations
Cleanliness Class
Filter grade and airflow method are determined based on Class standard and process particle tolerance.
Heat Load Consideration
HVAC capacity is calculated based on total heat load including equipment heat, lighting, personnel, and outdoor air conditions.
Airflow Method
Laminar or turbulent flow, ceiling system, and return path are reviewed to match the space structure.
Commissioning & TAB
Final operating conditions are set based on TAB criteria including airflow balancing and differential pressure adjustment.
Specifications
For a cleanroom AHU, overall system design — including filter stages, room pressure structure, automatic control, and HVAC heat source — matters more than any single piece of equipment. We propose integrated specifications tailored to process requirements, covering new construction as well as expansion and retrofit projects.
Considering a Cleanroom AHU?
We will propose specifications matched to your cleanliness standard, airflow, differential pressure, and filter grade.